JPS6411332U - - Google Patents

Info

Publication number
JPS6411332U
JPS6411332U JP1987105833U JP10583387U JPS6411332U JP S6411332 U JPS6411332 U JP S6411332U JP 1987105833 U JP1987105833 U JP 1987105833U JP 10583387 U JP10583387 U JP 10583387U JP S6411332 U JPS6411332 U JP S6411332U
Authority
JP
Japan
Prior art keywords
fluid pressure
pressure detection
port device
thin film
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987105833U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987105833U priority Critical patent/JPS6411332U/ja
Publication of JPS6411332U publication Critical patent/JPS6411332U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Exhaust Silencers (AREA)
JP1987105833U 1987-07-09 1987-07-09 Pending JPS6411332U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987105833U JPS6411332U (en]) 1987-07-09 1987-07-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987105833U JPS6411332U (en]) 1987-07-09 1987-07-09

Publications (1)

Publication Number Publication Date
JPS6411332U true JPS6411332U (en]) 1989-01-20

Family

ID=31338803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987105833U Pending JPS6411332U (en]) 1987-07-09 1987-07-09

Country Status (1)

Country Link
JP (1) JPS6411332U (en])

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